专利名称：DISPLACEMENT DETECTION APPARATUS发明人：Masaaki KUSUMI,Daisuke UCHIYAMA申请号：US14036573申请日：20130925
公开号：US20140103914A1公开日：20140417
专利附图：
摘要：A displacement detection apparatus includes a scale unit and a detection headunit. The scale unit has a reference track unit and sub-track units, the pitch directions ofthese units being different from one another. The detection head unit has three or moredetection units configured to read scales of the reference track unit and the sub-track
units and to output signals in accordance with the read scales. The three detection unitsdetect displacement in two orthogonal directions on a plane parallel to a plane alongwhich the detection head unit moves.
申请人：MORI SEIKI CO., LTD.
地址：Yamato-Koriyama City JP
国籍：JP
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