Optical waveguide element

专利名称：Optical waveguide element发明人：Motohiro Takemura,Masanao

Kurihara,Tetsuya Fujino

申请号：US14389416申请日：20130329公开号：US09291838B2公开日：20160322

专利附图：

摘要：An object of the present invention is to provide an optical waveguide elementthat effectively diffuses charges accumulated in a substrate, and suppress DC drift ortemperature drift. The optical waveguide element includes a substrate having an electro-

optical effect, optical waveguides formed in the substrate, a buffer layer (BF layer)formed on the substrate, and modulation electrodes (signal electrode and groundelectrode) that are formed on the buffer layer and modulate optical waves propagatingthrough the optical waveguides, a charge diffusion layer that diffuses charges generatedin the substrate is formed between the substrate and the buffer layer, and the chargediffusion layer is electrically connected with a ground electrode constituting themodulation electrode.

申请人：SUMITOMO OSAKA CEMENT CO., LTD.

地址：Chiyoda-Ku, Tokyo JP

国籍：JP

代理机构：Taft Stettinius & Hollister LLP

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